IGS metal diaphragm valve-Fornitore globale

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No. 8 Wenchang Avenue, Beijing Economic and Technological Development Zone (Postal Code: 100176)

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IGS metal diaphragm valve

The high-purity metal diaphragm valve applied to IGS adopts SUS316L secondary melted as the valve body material, and has multiple interfaces (C-seal a

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advantage

• Most suitable for high-purity process gas supply production line
The valve body is made of SUS316L material that has undergone secondary melting, which is safe and reliable
W-seal and C-seal are available for selection

Technical Parameter

size	SEMI F83-0304 1.125” W seal 2 Port	SEMI F84-0304 1.125” W seal 3 Port	SEMI F86-0304 1.125” C seal 2 Port
Cv value	0.24	0.24	0.27
Maximum service pressure	1.0MPa(G)
Temperature range for use	-10～80℃
External leakage	≦3x10^-12Pa・m³/sec Helium
Valve seat leakage	≦3x10^-10Pa・m³/sec Helium

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